Yamato Thermal Magnet: Do a coating machine suitable for the development of China's LED industry

[Source: "High-tech LED-technology and application" October issue]

LED is a technology-led industry, especially in the field of technology and capital-intensive chip manufacturing, which requires high-end process equipment to provide support. However, similar to the “bottleneck” under the LED investment boom, there is still a speed matching problem between equipment R&D and industrial expansion, especially in the field of high-end equipment, most of which still need to rely on imports.

High-profile cut into the market

Chip manufacturing requires device structure and process design based on the performance requirements of the LED. The main equipment includes etching machine, lithography machine, vapor deposition machine, sputtering machine, laser dicing machine and the like. The vapor deposition machine is mainly divided into a thermal evaporation stage and an electron beam evaporation stage according to the energy source. In view of the high melting point of the metal as the electrode and the high metal adhesion requirement, the electron beam evaporation coating machine is generally used in the LED industry.

"The price of imported equipment is expensive and the procurement cycle is too long. China's LED chip manufacturing industry urgently needs the growth and rise of local equipment." Sun Dong of CTO of Hangzhou Dahe Thermal Magnetics Co., Ltd. said that with the national and local governments, green energy conservation such as LED The project strongly advocates that Daiwa Thermomagnetic has acquired TEMESCAL from Edwards in 2010 with its years of equipment experience in the solar and new energy industries, thus having a high starting point for entering the LED equipment manufacturing industry.

Sun Dong said that for decades, FerrotecT eme scal has been deeply cooperating with world-class chip manufacturers and is a CREE exclusive coating machine supplier, contributing to CREE's recognized high performance chips in the industry. . “Although Dahe Thermomagnetic has certain advantages in technical support and industry experience, the high starting point is accompanied by high investment and high risk.” Sun Dong said that the high-profile cut-in brings certain difficulties to Dahe Thermal Magnet to enter the market quickly. .

He pointed out that because the current competition status of the domestic LED industry is still in the stage of low-price competition, most chip manufacturers provide low-cost chips. This competition mode is to reduce costs as the first consideration. The demand for equipment is first of all the price. To be low. The TEMESCAL purchased by Daiwa Thermomagnetic is a world-class production equipment, and its high cost is a huge obstacle to its entry into the domestic market. In order to solve the contradiction between high equipment cost and market demand, Dahe Thermomagnetic currently overcomes this difficulty by establishing a research and development production base in Hangzhou through the form of technology transfer.

Reduce system operating costs

In addition to technology transfer and the establishment of a research and development base in Hangzhou, Yamato Thermal Magnetics also tried to minimize the cost of system operation. "Our design objective is to minimize the operating cost of the system, including the high degree of system operation control and reliability of components and high productivity, low consumption, etc." Sun Dong introduced, TFC3500 high vacuum electron beam coating machine is It is the latest high-end precision coating machine developed for domestic and international LED manufacturing and other industrial fields. The structure design refers to the gold coverage area theory, which greatly improves the utilization rate of some expensive evaporation materials such as gold, thereby minimizing the production cost of the single chip.

Unfinished

For more information, please refer to the October issue of "High-tech LED-Technology and Applications"

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